sen, and Giessen, who are participating in the BMBF ErUM program. M1 Beamline – Scanning electron microscope and ToF-SIMS/SNMS The M1 beamline is equipped with a high-resolution scanning electron microscope [...] and mechanical characterization of samples. Furthermore, a dedicated ultra-high vacuum chamber at M1 is used for GeV Time-of-Flight Secondary Ion/Neutral Mass Spectrometry (ToF-SIMS/SNMS). This technique [...] These methods include: In-situ infrared and UV/vis optical transmission spectroscopy of thin samples (~100 μm), spatially resolved in-situ Raman spectroscopy, and on-line ionoluminescence spectroscopy. Additionally